Theme/Topics
DPS 2012 » Theme/Topics
Theme
Dry processes and related technologies from fundamentals to applications.
Topics
- Etching Technology
- Manufacturing Technology(AEC, APC, EES, FDC)
- Surface Reaction and Damage
- Plasma Diagnostics and Monitoring System
- Modeling and Simulation
- Plasma Generation(Equipment/Source)
- CVD/PVD/ALD
- Plasma Processes for 3D Device, FPD, Photovoltaic Devices
- Plasma Processes for new material devices (MRAM, Power, Organic)
- Plasma Processes for Biological and Medical Application, MEMS
- Atmospheric Pressure Plasma and Liquid Plasma
- New Dry Process Concepts
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