DPS2023 44th International Symposium on Dry Process
- Home
- »
- General Information
- »
- Theme/Topics/Arranged session
Theme/Topics/Arranged session
Theme
- Dry processes and related technologies from fundamentals to applications
Topics
- Etching Technologies
- Manufacturing Technologies (AEC, APC, EES, FDC)
- Surface Reaction and Damage
- Plasma Diagnostics and Monitoring Systems
- Computational Approaches (Modeling, Simulation, Machine Learning, AI, Informatics, DX) for Dry Process
- Plasma Generation (Equipment/Source)
- Deposition Technologies (CVD / PVD)
- Atomic Layer Processes (ALD/ALE)
- Dry process for Green Transformation:GX (Energy saving technology, Alternative gas, 3D-IC/Packaging)
- Plasma Processes for New Material Devices (MRAM, Power, Organic, III-V, 2D)
- Plasma Processes for Biological and Medical application, MEMS
- Atmospheric Pressure Plasma and Liquid Plasma
- New Dry Process Concepts
Arranged session
- Challenges to overcome the limits for high aspect ratio etching
- Atomic layer processes (ALE/ALD/ASD) toward 2nm and beyond
- How AI and Machine Learning are transforming dry process technologies