Awards
Definitions of Awards
DPS offers the following awards annually to recognize those who demonstrate outstanding achievements in the fields of interest to DPS.
DPS Nishizawa Award:
DPS Nishizawa Award is to be presented to an individual who has made outstanding contributions to DPS as well as significant academic/technological achievements in the fields of interest to DPS.
Best Presentation Award: (previously known as the "Best Paper Award" of DPS)
This award is to be offered annually to the authors of the paper that has been presented most excellently in the latest DPS and made significant academic/technological contributions to the fields of interest to DPS.
Young Researcher Award:
This award is to be offered annually to a young researcher who has made an outstanding presentation in the latest DPS. The awardee must be 35 years old or younger as of the 1st of January of the year in which his/her DPS presentation considered for the award is made.
DPS Paper Award:
This award is to be offered to the authors of the best paper published in the Special Issues of Japanese Journal of Applied Physics (JJAP) for DPS in the past 3 years (i.e., DPS 2015, 2016, and 2017) . The awardee(s) of the Best Presentation Award or Young Researcher Award is/are also eligible for this award.
Past Award Winners
Recipient of Nishizawa Award
DPS2018 Nishizawa Award:
- N. Hayasaka
- M.Nakamura
- K. Ono
- K. Tsujimoto
DPS2017 Nishizawa Award:
- D. B. Graves
- T. Makabe
- M. Yoneda
DPS2016 Nishizawa Award:
- H. Sugai
DPS2015 Nishizawa Award:
- K. Asakawa
DPS2014 Nishizawa Award:
- Y.Tarui
DPS2013 Nishizawa Award:
- H.Okano
DPS2012 Nishizawa Award:
- H. H. Sawin
- R. A. Gottscho
DPS2011 Nishizawa Award:
- N. Hosokawa and T. Tsukada
- S. Tachi
DPS2010 Nishizawa Award:
- J. W. Coburn
- H. F. Winters
DPS2009 Nishizawa Award:
- Haruhiko Abe
- Keizo Suzuki
DPS2008 Nishizawa Award:
- Masataka Hirose
- Yasuhiro Horiike
Best Presentation Award Winners
DPS2017 Best Presentation Award:
- M. Matsui (Hitachi Ltd.)
K. Kuwahara (Hitachi High-Technologies Corp.)
DPS2016 Best Presentation Award:
- T. Seki, T. Aoki, J. Matsuo (Kyoto University),
H. Yamamoto, T. Kozawa (Osaka University),
T. Shojo, K. Koike (Iwatani Corp.)
DPS2015 Best Presentation Award:
- O.Pollet, N. Posseme,
V. Ah-Leung(CEA-Leti),
M. Garcia Barros(ST Microelectronics)
Best Paper Award Winners
DPS2014 Best Paper Award:
- not applicable
DPS2013 Best Paper Award:
- not applicable
DPS2012 Best Paper Award:
- not applicable
DPS2011 Best Paper Award:
- K. Kinoshita (Tohoku University)
DPS2010 Best Paper Award:
- not applicable
DPS2009 Best Paper Award:
- Koji Eriguchi (Kyoto University)
DPS2008 Best Paper Award:
- M. Fukasawa (Sony Corp.)
DPS2007 Best Paper Award:
- G. Delgadino (Lam Research Corp.)
DPS2006 Best Paper Award:
- M. Kurihara (Hitachi, Ltd.)
DPS2005 Best Paper Award:
- not applicable
DPS2004 Best Paper Award:
- not applicable
DPS2003 Best Paper Award:
- not applicable
DPS2002 Best Paper Award:
- Yoshinori Momonoi (Hitachi Ltd.)
- Takanori Ichiki (University of Tokyo)
DPS2001 Best Paper Award:
- Junko Abe (Toshiba Corp.)
DPS2000 Best Paper Award:
- N. Negishi (Hitachi, Ltd.)
Young Researcher Award Winners
DPS2017 Young Researcher Award:
- A. Hirata (Sony Semiconductor Solutions Corp.)
- Y. Yoshikawa (Kyoto University)
DPS2016 Young Researcher Award:
- Y. Ishii (Hitachi High Technologies America, Inc.)
- N. Miyoshi (Hitachi, Ltd.)
- T. Ueyama (Nagoya University)
DPS2015 Young Researcher Award:
- T. Iwase(Hitachi Ltd.)
- N. Nakazaki(Kyoto University)
DPS2014 Young Researcher Award:
- H. Li(Osaka University)
- Z. Liu(Nagoya University)
- T. Shigetoshi(Sony Corp.)
DPS2013 Young Researcher Award:
- Y.Ding (Tokyo Inst. of Tech)
- H.Yamamoto (Toshiba Corp.)
DPS2012 Young Researcher Award:
- S.Hayashi (Hiroshima University)
- A.Pandey (Chubu University)
DPS2011 Young Researcher Award:
- Hirotaka Tsuda (Kyoto University)
- Naoya Sumi (Nagoya University)
DPS2010 Young Researcher Award:
- Tomoko Ito (Osaka University)
- Asahiko Matsuda (Kyoto University)
- Hideharu Shimizu (Taiyo-Nippon Sanso Co.)
PS2009 Young Researcher Award:
- Hiroshi Yamamoto (Nagoya University)
- A. Kawanami (Hiroshima University)
DPS2008 Young Researcher Award:
- M. J. Titus (University of Calfornia, Berkeley)
- H. Furukawa (Hiroshima University)
DPS2007 Young Researcher Award:
- T. Ohchi (Sony Corp.)
- T. Yorimoto (Hiroshima University)
DPS2006 Young Researcher Award:
- E. Kesters (IMEC)
DPS2005 Young Researcher Award:
- Yasuhiro Morikawa (ULVAC. Inc.)
- W. S. Hwang (National University of Singapore)
DPS2004 Young Researcher Award:
- Kazuo Takahashi (Kyoto University)
DPS2003 Young Researcher Award:
- Nobuyuki Negishi (Hitachi, Ltd.)
- Koji Yamakawa (Nagoya University)
DPS2002 Young Researcher Award:
- Kazutake Taniguchi (University of Tokyo)
DPS2001 Young Researcher Award:
- Takeshi Kuriyagawa (University of Tokyo)
- Kazuo Takahashi (Kyoto University)
DPS2000 Young Researcher Award:
- Hyun-Ho Doh (University of Tokyo)
- Hisao Nagai (Nagoya University)
DPS Paper Award Winners
DPS paper award that is given to excellent papers in the recent special issues of “Dry Process”, and the article is set “Open Access” for ever.
DPS2018 DPS Paper Award:
- N. Miyoshi, H. Kobayashi, K. Shinoda, M. Kurihara, T. Watanabe, Y. Kouzuma, K. Yokogawa, S. Sakai, M. Izawa
for their paper published as:
"Atomic layer etching of silicon nitride using infrared annealing for short desorption time of ammonium fluorosilicate", JJAP, 56 (2017), 06HB01
DPS2017 DPS Paper Award:
- T. Sasaki, K. Matsuda, M. Omura, I. Sakai, H. Hayashi
for their paper published as:
"Highly selective etching of LaAlSiOx to Si using C4F8/Ar/H2 plasma", JJAP, 54(2015), 06GB03
DPS2016 DPS Paper Award:
- K. Kinoshita, S. Fukami, M. Murahata, N. Kasai, S. Ikeda, H. Ohno,(Tohoku University), H. Honjo ,R. Nebashi, K. Tokutome, S. Miura(NEC Corporation)
for their paper published as:
"Plasma process induced physical damages on multilayered magnetic films for magnetic domain wall motion ", Japanese Journal of Applied Physics, Volume 53, JAPP, 53(2014), 03DF03
DPS2015 DPS Paper Award:
- K. Eriguchi, A. Matsuda, Y. Takao, and Kouichi Ono(Kyoto University)
for their paper published as:
"Effects of straggling of incident ions on plasma-induced damage creation in "fin"-type field-effect transistors", Japanese Journal of Applied Physics, Volume 53, JJAP, 53(2014), 03DE02