Recipients of DPS2024 Nishizawa Award:
Steven M. George
Professor
University of Colorado
Tetsuya Tatsumi
Distinguished Engineer
Sony Semiconductor Solutions Corporation
Recipients of DPS2024 Achievement Award:
Keiji Nakamura
Professor
Chubu University
Tokuhisa Ohiwa
Senior Consultant
Sompo Risk Management Inc.
Scope
The 45th International Symposium on Dry Process (DPS2024) will be held at Chitose Civic Culture Center, Hokkaido, Japan from November 14 to 15, 2024. The Symposium covers all aspects of the rapidly evolving fields of dry processes, including but not limited to plasma etching and deposition processes, diagnostics and modeling of plasmas and surfaces, and surface modifications by plasmas, for the applications in, e.g., microelectronics, power devices, sensors, environmental protection, biological systems, and medicine. The DPS has provided valuable forums for in-depth discussion among professionals and students working in this exciting field for more than four decades.
Notice for DPS2024 Participants
DPS2024 will be held completely in person (On-site only).
Please note that live-streaming or archive for streaming will not be provided.
Important dates
| Abstract Submission Deadline: | July 15, 2024 |
| Notification of Abstract Acceptance: | September 13, 2024 |
| Early Registration Deadline: | September 30, 2024 |
| Late Registration Deadline (Online): | October 25, 2024 |
| Publish Proceedings (Abstracts): | November 7, 2024 |
Recent Updates
- Nov.07, 2024
- JJAP special issue On-Line Submission is opened.
- Oct. 29, 2024
- Timetable updated.
- Oct. 25, 2024
- On-line registration is closed. The registration at DPS2024 venue is also available.
- Oct. 17, 2024
- Poster Program opened.
- Oct. 09, 2024
- Presentation Guidelines is opened.
- Sep. 17, 2024
- Timetable(Tentative) updated.
- Sep. 13, 2024
- Notification of abstract acceptance was announced.
- Jul. 19, 2024
- Information/Guideline for DPS Career Assistant Board is available.
- Jun. 24, 2024
- Registration Online opened.
- Jun. 21, 2024
- Timetable(Tentative) is available.
- May 08, 2024
- On-Line Submission system is opened.
- Feb. 06, 2024
- DPS2024 website open.
News for the Special Issues of Japanese Journal of Applied Physics (JJAP).
IF for the special issue of DPS in JJAP
1.67 (2017)
- The publication charge is 40000JPY/article.
https://iopscience.iop.org/journal/1347-4065/page/About - JJAP Special Issues is published in the web site;
DPS2023 (Jpn. J. Appl. Phys. 63 July 2024.) (Free until July 2025)
https://iopscience.iop.org/collections/jjap-240402-02
DPS2022 (Jpn. J. Appl. Phys. 62 July 2023.) (Free until July 2024)
https://iopscience.iop.org/issue/1347-4065/62/SI
DPS2021 (Jpn. J. Appl. Phys. 61 July 2022.)
https://iopscience.iop.org/issue/1347-4065/61/SI
DPS2019 (Jpn. J. Appl. Phys. 59 June 2020.)
https://iopscience.iop.org/issue/1347-4065/59/SJ
DPS2018 (Jpn. J. Appl. Phys. 58 June 2019.)
https://iopscience.iop.org/issue/1347-4065/58/SE
OPEN ACCESS & FREE ACCESS
News for Japanese members
応用物理学会プラズマエレクトロニクス分科会の主催により、「第35回プラズマエレクトロニクス講習会」を 2024 年 11 月 29 日(金) にグランパークカンファレンス401ホール（東京）にて開催致します。
本講習会では産業応用で必要とされるプラズマプロセスの基礎と応用技術について、各分野にて第一線でご活躍の先生方よりご講義を頂きます。詳しくは こちら をご参照ください。